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双(甲基-η5-环戊二烯)甲氧基甲基锆
Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium
产品别名
双(甲基-η5-环戊二烯)甲氧基甲基锆
Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium
ZrD-CO4
ZRCMMM
结构式
基本信息
| Linear Formula【线性分子式】 | Zr(CH3C5H4)2CH3OCH3 |
| Molecular weight | 295.53 |
| MDL number | MFCD16875687 |
| PubChem Substance ID【PubChem化学物质编号】 | 329764163 |
| NACRES | NA.23 |
| General description【一般描述】 | Atomic number of base material: 40 Zirconium |
| Application【应用】 | Advanced precursor for atomic layer deposition of ZrO2 thin films. Hafnium and zirconium oxides are leading candidates to replace silicion dioxide as the gate oxide in a variety of semiconductor and energy applications. Excellent properties of HfO2 and ZrO2 films make them especially attractive for gate oxide replacement and as potential insulating dielectrics for capacitive elements in memory devices such as DRAM. Precursors Packaged for Depositions Systems |
| Features and Benefits【特点和优势】 | Compatible with a variety of oxidants in ALD growth processes across a wide temperature range exhibiting self limiting growth up to 400 ℃. Precursor volatility and thermal stability properties enable easy materials transport from bubblers into conventional deposition tools. |
产品性质
| form【形式】 | liquid |
| reaction suitability | core: zirconium |
| color【颜色】 | colorless |
| bp | 110 ℃/0.5 mmHg (lit.) |
| density | 1.27 g/mL±0.01 g/mL at 25 ℃ (lit.) |
| SMILES string | C[C]1[C][C][C][C]1.C[C]2[C][C][C][C]2.C[Zr]OC |
| InChI | 1S/2C6H7.CH3O.CH3.Zr/c2*1-6-4-2-3-5-6;1-2;;/h2*2-5H,1H3;1H3;1H3;/q;;-1;;+1 |
| InChI key | LFGIFPGCOXPKMG-UHFFFAOYSA-N |
| packaging【包装】 | 10 g in stainless steel cylinder Packaged in stainless steel cylinders compatible with conventional deposition systems. Precursors may be used in liquid injection systems as dilute solutions and in combination with a variety of other sources to deposit mixed oxides. |
安全信息
| Pictograms【象形图】 | GHS07 |
| Signal word【警示用语：】 | Warning |
| Hazard Statements | H302 - H315 - H319 |
| Precautionary Statements | P305 + P351 + P338 |
| Hazard Classifications【危险分类】 | Acute Tox. 4 Oral - Eye Irrit. 2 - Skin Irrit. 2 |
| Storage Class Code【储存分类代码】 | 10 - Combustible liquids not in Storage Class 3 |
| WGK | WGK 3 |
| Flash Point(F)【闪点(F)】 | 226.4 °F |
| Flash Point(C)【闪点(C)】 | 108 ℃ |
